Hypothesis on the Influence of the Magnetic Behaviour of Hydrogen Doped Zinc Oxide during Its Plasma Sputtering Process
Journal article
Salimian, A., Hasnath, A., Aminishahsavarani, A. and Upadhyaya, H. (2021). Hypothesis on the Influence of the Magnetic Behaviour of Hydrogen Doped Zinc Oxide during Its Plasma Sputtering Process. Coatings. 11 (2), p. e222. https://doi.org/10.3390/coatings11020222
| Authors | Salimian, A., Hasnath, A., Aminishahsavarani, A. and Upadhyaya, H. |
|---|---|
| Abstract | We investigate the complexity of the reactive sputtering of highly conductive zinc oxide thin films in the presence of hydrogen at room temperature. We report on the importance of precise geometric positioning of the substrate with respect to the magnetron to achieve maximum conductivity. We examine the electrical properties of the deposited thins films based on their position on the substrate holder relative to the magnetron. By considering early reports by other researchers on the angular dependency of plasma parameters and the effect of hydrogen doping on electric and magnetic properties of hydrogen-doped zinc oxide, we propose a hypothesis on the possibility of such properties resulting in the observations presented in this report pending further tests to verify this hypothesis. Overall, in this report we present the guide by which highly conductive zinc oxide thin film coatings can be prepared via RF sputtering with hydrogen presence along with argon as the sputtering gas. |
| Keywords | sputtering; zinc oxide; magnetic; TCO; hydrogen doping |
| Year | 2021 |
| Journal | Coatings |
| Journal citation | 11 (2), p. e222 |
| Publisher | MDPI |
| ISSN | 2079-6412 |
| Digital Object Identifier (DOI) | https://doi.org/10.3390/coatings11020222 |
| Funder/Client | Global Challenges Research Fund |
| Publication dates | |
| 13 Feb 2021 | |
| Online | 13 Feb 2021 |
| Publication process dates | |
| Deposited | 22 Feb 2021 |
| Accepted | 09 Feb 2021 |
| Publisher's version | License File Access Level Open |
| License | https://creativecommons.org/licenses/by/4.0/ |
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