Highly Conductive Zinc Oxide Based Transparent Conductive Oxide Films Prepared using RF Plasma Sputtering Under Reducing Atmosphere

Journal article


Salimian, A., Upadhyaya, H., Hasnath, A., Aminishahsavarani, A., Pardo Sanchez, C., Anguilano, L., Uchechukwu O. and Sanchez, C (2020). Highly Conductive Zinc Oxide Based Transparent Conductive Oxide Films Prepared using RF Plasma Sputtering Under Reducing Atmosphere. Coatings. 10 (5), p. 472. https://doi.org/10.3390/coatings10050472
AuthorsSalimian, A., Upadhyaya, H., Hasnath, A., Aminishahsavarani, A., Pardo Sanchez, C., Anguilano, L., Uchechukwu O. and Sanchez, C
Abstract

The spectral properties and colour functions of a radio frequency (RF)-based sputtering plasma source was monitored during consecutive sputter deposition of zinc doped indium oxide (IZO) thin films under argon and argon/hydrogen mix. The effect of target exposure to the hydrogen gas on charge density/mobility and spectral transmittance of the deposited films was investigated. We demonstrate that consecutive exposure to the hydrogen gas during the deposition process progressively affects the properties of thin films with a certain degree of continuous improvement in electrical conductivity while demonstrating that reverting to only argon from argon/ hydrogen mix follows a complex pathway, which has not been reported previously in such detail to our knowledge. We then demonstrate that this effect can be used to prepare highly conductive zinc oxide thin films without indium presence and as such eliminating the need for the expensive indium addition. We shall demonstrate that complexity observed in emission spectra can be simply identified by monitoring the colour of the plasma through its colour functions, making this technique a simple real-time monitoring method for the deposition process.

KeywordsSputtering; ZnO; IZO; TCO; Plasma; Conducting Oxides; Transparent; Hydrogen
Year2020
JournalCoatings
Journal citation10 (5), p. 472
PublisherMDPI
ISSN2079-6412
Digital Object Identifier (DOI)https://doi.org/10.3390/coatings10050472
Web address (URL)https://www.mdpi.com/2079-6412/10/5/472
FunderEngineering and Physical Sciences Research Council (EPSRC)
Publication dates
Print13 May 2020
Publication process dates
Submitted11 Apr 2020
Deposited21 May 2020
Publisher's version
License
File Access Level
Open
Additional information

This research was funded by Grand Challenge Research Fund (GCRF) toward the SUNRISE program,
No. EP/P032591/1.
We would like to thank Scientific Vaccum Systems UK and George Fern (Brunel University
London) for their support on this project.

Permalink -

https://openresearch.lsbu.ac.uk/item/89wxq

Download files

Publisher's version
coatings-10-00472 (5).pdf
License: CC BY 4.0
File access level: Open

  • 6
    total views
  • 5
    total downloads
  • 0
    views this month
  • 1
    downloads this month

Export as

Related outputs

Phase evolution, morphological, optical and electrical properties of femtosecond pulsed laser deposited TiO2 thin films
Kumi-Barimah, E, Penhale-Jones, R, Salimian, A, Upadhyaya, H, Hasnath, A and Jose, G (2020). Phase evolution, morphological, optical and electrical properties of femtosecond pulsed laser deposited TiO2 thin films. Scientific Reports. 10 (1). https://doi.org/10.1038/s41598-020-67367-x
Resilient and Agile Engineering Solutions to Address Societal Challenges like Coronavirus Pandemic
Goel, S., Hawi, S., Goel, G., Thakur, V.K., Pearce, O., Hoskins, C., Hussain, T., Agrawal, A., Upadhyaya, H., Cross, G. and Barber, A. (2020). Resilient and Agile Engineering Solutions to Address Societal Challenges like Coronavirus Pandemic. Materials Today Chemistry. https://doi.org/10.1016/j.mtchem.2020.100300
Synthesis of SnSe quantum dots by successive ionic layer adsorption and reaction (SILAR) method for efficient solar cells applications
Kishore Kumar, D, Loskot, J, Kříž, J, Bennett, N, Upadhyaya, HM, Sadhu, V, Venkata Reddy, C and Reddy, KR (2020). Synthesis of SnSe quantum dots by successive ionic layer adsorption and reaction (SILAR) method for efficient solar cells applications. Solar Energy. 199, pp. 570-574. https://doi.org/10.1016/j.solener.2020.02.050
Optimizing room temperature binder free TiO2 paste for high efficiency flexible polymer dye sensitized solar cells
Kishore Kumar, D, Hsu, MH, Ivaturi, A, Chen, B, Bennett, N and Upadhyaya, HM (2019). Optimizing room temperature binder free TiO2 paste for high efficiency flexible polymer dye sensitized solar cells. Flexible and Printed Electronics. 4 (1), pp. 015007-015007. https://doi.org/10.1088/2058-8585/ab02c4
Low-temperature titania-graphene quantum dots paste for flexible dye-sensitised solar cell applications
Kumar, DK, Suazo-Davila, D, García-Torres, D, Cook, NP, Ivaturi, A, Hsu, MH, Martí, AA, Cabrera, CR, Chen, B, Bennett, N and Upadhyaya, HM (2019). Low-temperature titania-graphene quantum dots paste for flexible dye-sensitised solar cell applications. Electrochimica Acta. 305, pp. 278-284. https://doi.org/10.1016/j.electacta.2019.03.040
Scalable screen-printing manufacturing process for graphene oxide platinum free alternative counter electrodes in efficient dye sensitized solar cells
Kumar, DK, Swami, SK, Dutta, V, Chen, B, Bennett, N and Upadhyaya, HM (2019). Scalable screen-printing manufacturing process for graphene oxide platinum free alternative counter electrodes in efficient dye sensitized solar cells. FlatChem. 15, pp. 100105-100105. https://doi.org/10.1016/j.flatc.2019.100105
Screen printed tin selenide films used as the counter electrodes in dye sensitized solar cells
Kishore Kumar, D, Popuri, SR, Swami, SK, Onuoha, OR, Bos, JW, Chen, B, Bennett, N and Upadhyaya, HM (2019). Screen printed tin selenide films used as the counter electrodes in dye sensitized solar cells. Solar Energy. 190, pp. 28-33. https://doi.org/10.1016/j.solener.2019.07.066