Highly Conductive Zinc Oxide Based Transparent Conductive Oxide Films Prepared using RF Plasma Sputtering Under Reducing Atmosphere

Journal article


Salimian, A., Upadhyaya, H., Hasnath, A., Aminishahsavarani, A., Pardo Sanchez, C., Anguilano, L., Uchechukwu O. and Sanchez, C (2020). Highly Conductive Zinc Oxide Based Transparent Conductive Oxide Films Prepared using RF Plasma Sputtering Under Reducing Atmosphere. Coatings. 10 (5), p. 472. https://doi.org/10.3390/coatings10050472
AuthorsSalimian, A., Upadhyaya, H., Hasnath, A., Aminishahsavarani, A., Pardo Sanchez, C., Anguilano, L., Uchechukwu O. and Sanchez, C
Abstract

The spectral properties and colour functions of a radio frequency (RF)-based sputtering plasma source was monitored during consecutive sputter deposition of zinc doped indium oxide (IZO) thin films under argon and argon/hydrogen mix. The effect of target exposure to the hydrogen gas on charge density/mobility and spectral transmittance of the deposited films was investigated. We demonstrate that consecutive exposure to the hydrogen gas during the deposition process progressively affects the properties of thin films with a certain degree of continuous improvement in electrical conductivity while demonstrating that reverting to only argon from argon/ hydrogen mix follows a complex pathway, which has not been reported previously in such detail to our knowledge. We then demonstrate that this effect can be used to prepare highly conductive zinc oxide thin films without indium presence and as such eliminating the need for the expensive indium addition. We shall demonstrate that complexity observed in emission spectra can be simply identified by monitoring the colour of the plasma through its colour functions, making this technique a simple real-time monitoring method for the deposition process.

KeywordsSputtering; ZnO; IZO; TCO; Plasma; Conducting Oxides; Transparent; Hydrogen
Year2020
JournalCoatings
Journal citation10 (5), p. 472
PublisherMDPI
ISSN2079-6412
Digital Object Identifier (DOI)https://doi.org/10.3390/coatings10050472
Web address (URL)https://www.mdpi.com/2079-6412/10/5/472
Funder/ClientEngineering and Physical Sciences Research Council (EPSRC)
Publication dates
Print13 May 2020
Publication process dates
Submitted11 Apr 2020
Deposited21 May 2020
Publisher's version
License
File Access Level
Open
Additional information

This research was funded by Grand Challenge Research Fund (GCRF) toward the SUNRISE program,
No. EP/P032591/1.
We would like to thank Scientific Vaccum Systems UK and George Fern (Brunel University
London) for their support on this project.

Permalink -

https://openresearch.lsbu.ac.uk/item/89wxq

Download files


Publisher's version
coatings-10-00472 (5).pdf
License: CC BY 4.0
File access level: Open

  • 31
    total views
  • 34
    total downloads
  • 0
    views this month
  • 0
    downloads this month

Export as

Related outputs

Large scale manufacturing route to metamaterial coatings using thermal spray techniques and their response to solar radiation
Faisal, N.H., Sellami, N., Venturi, F., Hussain, T., Mallick, T., Muhammad-Sukki, F., Bishop, A., Upadhyaya, H., Kumar, N. and Goel, S. (2021). Large scale manufacturing route to metamaterial coatings using thermal spray techniques and their response to solar radiation. Emergent Materials. https://doi.org/10.1007/s42247-021-00252-z
Atomic scale friction studies on single crystal GaAs using AFM and molecular dynamics simulation
Fan, P., Goel, S., Luo, X. and Upadhyaya, H. (2021). Atomic scale friction studies on single crystal GaAs using AFM and molecular dynamics simulation. Nanomanufacturing and Metrology. https://doi.org/10.1007/s41871-021-00109-3
Hypothesis on the Influence of the Magnetic Behaviour of Hydrogen Doped Zinc Oxide during its Plasma Sputtering Process
Salimian, A., Hasnath, A., Aminishahsavarani, A. and Upadhyaya, H. (2021). Hypothesis on the Influence of the Magnetic Behaviour of Hydrogen Doped Zinc Oxide during its Plasma Sputtering Process. Coatings. 11 (222). https://doi.org/10.3390/coatings11020222
Horizons of modern molecular dynamics simulation in digitalised solid freeform fabrication with advanced materials
Goel, S., Knaggs, M., Goel, G., Zhou, X. W., Upadhyaya, H.M., Thakur, V. F., Kumar, V., Bizarri, G., Tiwari, A., Murphy, A., Stukowskii, A. and Matthewsj, A. (2020). Horizons of modern molecular dynamics simulation in digitalised solid freeform fabrication with advanced materials. Materials Today Chemistry. 18, p. 100356. https://doi.org/10.1016/j.mtchem.2020.100356
Phase evolution, morphological, optical and electrical properties of femtosecond pulsed laser deposited TiO2 thin films
Kumi-Barimah, E, Penhale-Jones, R, Salimian, A, Upadhyaya, H, Hasnath, A and Jose, G (2020). Phase evolution, morphological, optical and electrical properties of femtosecond pulsed laser deposited TiO2 thin films. Scientific Reports. 10 (1). https://doi.org/10.1038/s41598-020-67367-x
Resilient and Agile Engineering Solutions to Address Societal Challenges like Coronavirus Pandemic
Goel, S., Hawi, S., Goel, G., Thakur, V.K., Pearce, O., Hoskins, C., Hussain, T., Agrawal, A., Upadhyaya, H., Cross, G. and Barber, A. (2020). Resilient and Agile Engineering Solutions to Address Societal Challenges like Coronavirus Pandemic. Materials Today Chemistry. https://doi.org/10.1016/j.mtchem.2020.100300
Synthesis of SnSe quantum dots by successive ionic layer adsorption and reaction (SILAR) method for efficient solar cells applications
Kishore Kumar, D, Loskot, J, Kříž, J, Bennett, N, Upadhyaya, HM, Sadhu, V, Venkata Reddy, C and Reddy, KR (2020). Synthesis of SnSe quantum dots by successive ionic layer adsorption and reaction (SILAR) method for efficient solar cells applications. Solar Energy. 199, pp. 570-574. https://doi.org/10.1016/j.solener.2020.02.050
Optical analysis of RF sputtering plasma through colour characterization
Salimian, A., Haghpanahan, R., Hasnath, A. and Upadhyaya, H. (2019). Optical analysis of RF sputtering plasma through colour characterization. Coatings. 9 (5), pp. 315-315. https://doi.org/10.3390/coatings9050315
Ambient stable, hydrophobic, electrically conductive porphyrin hole-extracting materials for printable perovskite solar cells
Reddy, G., Katakam, R., Devulapally, K., Jones, L.A., Della Gaspera, E., Upadhyaya, H.M., Islavath, N. and Giribabu, L. (2019). Ambient stable, hydrophobic, electrically conductive porphyrin hole-extracting materials for printable perovskite solar cells. Journal of Materials Chemistry C. 7 (16), pp. 4702-4708. https://doi.org/10.1039/c9tc00605b
Optimizing room temperature binder free TiO2 paste for high efficiency flexible polymer dye sensitized solar cells
Kishore Kumar, D, Hsu, MH, Ivaturi, A, Chen, B, Bennett, N and Upadhyaya, HM (2019). Optimizing room temperature binder free TiO2 paste for high efficiency flexible polymer dye sensitized solar cells. Flexible and Printed Electronics. 4 (1), pp. 015007-015007. https://doi.org/10.1088/2058-8585/ab02c4
Low-temperature titania-graphene quantum dots paste for flexible dye-sensitised solar cell applications
Kumar, DK, Suazo-Davila, D, García-Torres, D, Cook, NP, Ivaturi, A, Hsu, MH, Martí, AA, Cabrera, CR, Chen, B, Bennett, N and Upadhyaya, HM (2019). Low-temperature titania-graphene quantum dots paste for flexible dye-sensitised solar cell applications. Electrochimica Acta. 305, pp. 278-284. https://doi.org/10.1016/j.electacta.2019.03.040
Scalable screen-printing manufacturing process for graphene oxide platinum free alternative counter electrodes in efficient dye sensitized solar cells
Kumar, DK, Swami, SK, Dutta, V, Chen, B, Bennett, N and Upadhyaya, HM (2019). Scalable screen-printing manufacturing process for graphene oxide platinum free alternative counter electrodes in efficient dye sensitized solar cells. FlatChem. 15, pp. 100105-100105. https://doi.org/10.1016/j.flatc.2019.100105
Screen printed tin selenide films used as the counter electrodes in dye sensitized solar cells
Kishore Kumar, D, Popuri, SR, Swami, SK, Onuoha, OR, Bos, JW, Chen, B, Bennett, N and Upadhyaya, HM (2019). Screen printed tin selenide films used as the counter electrodes in dye sensitized solar cells. Solar Energy. 190, pp. 28-33. https://doi.org/10.1016/j.solener.2019.07.066
ZnCdS:Cu,Al,Cl: A near infra-red emissive family of phosphors for marking, coding, and identification
Silver, J, Marsh, PJ, Fern, GR, Ireland, TG and Salimian, A (2018). ZnCdS:Cu,Al,Cl: A near infra-red emissive family of phosphors for marking, coding, and identification. ECS Journal of Solid State Science and Technology. 7 (1), pp. R3057-R3063. https://doi.org/10.1149/2.0131801jss
Development of high temperature, radiation hard detectors based on diamond
Metcalfe, A, Fern, GR, Hobson, PR, Ireland, T, Salimian, A, Silver, J, Smith, DR, Lefeuvre, G and Saenger, R (2017). Development of high temperature, radiation hard detectors based on diamond. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 845, pp. 128-131. https://doi.org/10.1016/j.nima.2016.06.091
Investigating the emission characteristics of single crystal YAG when activated by high power laser beams
Salimian, A, Silver, J, Fern, GR, Upadhyaya, H, Metcalfe, A, Ireland, TG, Harris, P and Haghpanahan, R (2016). Investigating the emission characteristics of single crystal YAG when activated by high power laser beams. ECS Journal of Solid State Science and Technology. 5 (10), pp. R172-R177. https://doi.org/10.1149/2.0271610jss
Laser diode induced lighting modules
Salimian, A., Fern, G.R., Upadhyaya, H. and Silver, J. (2016). Laser diode induced lighting modules. ECS Journal of Solid State Science and Technology. 5 (3), pp. R26-R33. https://doi.org/10.1149/2.0101603jss
High mobility titanium-doped indium oxide for use in tandem solar cells deposited via pulsed DC magnetron sputtering
Grew, B, Bowers, JW, Lisco, F, Arnou, N, Walls, JM and Upadhyaya, HM (2014). High mobility titanium-doped indium oxide for use in tandem solar cells deposited via pulsed DC magnetron sputtering. Energy Procedia. 60 (C), pp. 148-155. https://doi.org/10.1016/j.egypro.2014.12.357
Design and optimisation of process parameters in an in-line CIGS evaporation pilot system
Wei, Z., Bobbili, P.R., Senthilarasu, S., Shimell, T. and Upadhyaya, H.M. (2014). Design and optimisation of process parameters in an in-line CIGS evaporation pilot system. Surface & Coatings Technology. 241, pp. 159-167. https://doi.org/10.1016/j.surfcoat.2013.10.033
Spray deposited copper zinc tin sulphide (Cu<inf>2</inf>ZnSnS<inf>4</inf>) film as a counter electrode in dye sensitized solar cells
Swami, S.K., Chaturvedi, N., Kumar, A., Chander, N., Dutta, V., Kumar, D.K., Ivaturi, A., Senthilarasu, S. and Upadhyaya, H.M. (2014). Spray deposited copper zinc tin sulphide (Cu<inf>2</inf>ZnSnS<inf>4</inf>) film as a counter electrode in dye sensitized solar cells. Physical Chemistry Chemical Physics. 16 (43), pp. 23993-23999. https://doi.org/10.1039/c4cp03312d