An Aerosol-Assisted Chemical Vapor Deposition Route to Tin-Doped Gallium Oxide Thin Films with Optoelectronic Properties
Journal article
Chen, R., Sathasivam, S., Borowiec, J. and Carmalt, C. (2024). An Aerosol-Assisted Chemical Vapor Deposition Route to Tin-Doped Gallium Oxide Thin Films with Optoelectronic Properties. ACS Applied Electronic Materials. https://doi.org/10.1021/acsaelm.4c00973
Authors | Chen, R., Sathasivam, S., Borowiec, J. and Carmalt, C. |
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Abstract | Gallium oxide is a wide-bandgap compound semiconductor material renowned for its diverse applications spanning gas sensors, liquid crystal displays, transparent electrodes, and ultraviolet detectors. This paper details the aerosol assisted chemical vapor deposition synthesis of tin doped gallium oxide thin films using gallium acetylacetonate and monobutyltin trichloride dissolved in methanol. It was observed that Sn doping resulted in a reduction in the transmittance of Ga2O3 films within the visible spectrum, while preserving the wide bandgap characteristics of 4.8 eV. Furthermore, Hall effect testing revealed a substantial decrease in the resistivity of Sn-doped Ga2O3 films, reducing it from 4.2 × 106 Ω cm to 2 × 105 Ω cm for the 2.5 at. % Sn:Ga2O3 compared to the nominally undoped Ga2O3. |
Year | 2024 |
Journal | ACS Applied Electronic Materials |
Publisher | American Chemical Society (ACS) |
ISSN | 2637-6113 |
Digital Object Identifier (DOI) | https://doi.org/10.1021/acsaelm.4c00973 |
Web address (URL) | https://pubs.acs.org/doi/10.1021/acsaelm.4c00973 |
Funder/Client | Engineering and Physical Sciences Research Council |
London South Bank University | |
Publication dates | |
Online | 12 Aug 2024 |
Publication process dates | |
Accepted | 29 Jul 2024 |
Deposited | 21 Aug 2024 |
Publisher's version | License File Access Level Open |
https://openresearch.lsbu.ac.uk/item/97z60
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Publisher's version
chen-et-al-2024-an-aerosol-assisted-chemical-vapor-deposition-route-to-tin-doped-gallium-oxide-thin-films-with.pdf | ||
License: CC BY 4.0 | ||
File access level: Open |
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