Transparent and Conducting Boron Doped ZnO Thin Films Grown By Aerosol Assisted Chemical Vapor Deposition

Journal article


Sathasivam, S., Zhao, S., Wang, M. and Carmalt, C.J. (2022). Transparent and Conducting Boron Doped ZnO Thin Films Grown By Aerosol Assisted Chemical Vapor Deposition. RSC Advances. https://doi.org/10.1039/D2RA05895B
AuthorsSathasivam, S., Zhao, S., Wang, M. and Carmalt, C.J.
Abstract

ZnO based transparent conducting oxides are important as they provide an alternative to the more expensive Sn:In2O3 that currently dominates the industry. Here, we investigate B-doped ZnO thin films grown via aerosol assisted chemical vapour deposition. B:ZnO films were produced from zinc acetate and triethylborane using either tetrahydrofuran or methanol (MeOH) as the solvent. The lowest resistivity of 5.1 x 10-3 .cm along with a visible light transmittance of ~75 - 80% was achieved when using MeOH as the solvent. XRD analysis only detected the wurtzite phase of ZnO suggesting successful solid solution formation with B3+ substituting Zn2+ sites in the lattice. Refinement of the XRD patterns showed minimal distortion to the ZnO unit cell upon doping when MeOH was the solvent due to the immiscibility of the [BEt3] solution (1.0M solution in hexane) in methanol that limited the amount of B going into the films, thus preventing excessive doping.

KeywordsTransparent Conducting Oxides, Zinc Oxide, CVD
Year2022
JournalRSC Advances
PublisherRoyal Society of Chemistry (RSC)
ISSN2046-2069
Digital Object Identifier (DOI)https://doi.org/10.1039/D2RA05895B
Web address (URL)https://pubs.rsc.org/en/content/articlehtml/2022/ra/d2ra05895b
Publication dates
Print17 Nov 2022
Publication process dates
Accepted11 Nov 2022
Deposited30 Jan 2023
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