Transparent and conducting boron doped ZnO thin films grown by aerosol assisted chemical vapor deposition.
Journal article
Zhao, D., Sathasivam, S., Wang, M. and Carmalt, C. (2022). Transparent and conducting boron doped ZnO thin films grown by aerosol assisted chemical vapor deposition. RSC Advances. 12 (51), pp. 33049-33055. https://doi.org/10.1039/d2ra05895b
Authors | Zhao, D., Sathasivam, S., Wang, M. and Carmalt, C. |
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Abstract | ZnO based transparent conducting oxides are important as they provide an alternative to the more expensive Sn : In O that currently dominates the industry. Here, we investigate B-doped ZnO thin films grown aerosol assisted chemical vapour deposition. B : ZnO films were produced from zinc acetate and triethylborane using either tetrahydrofuran or methanol (MeOH) as the solvent. The lowest resistivity of 5.1 × 10 Ω cm along with a visible light transmittance of ∼75-80% was achieved when using MeOH as the solvent. XRD analysis only detected the wurtzite phase of ZnO suggesting successful solid solution formation with B substituting Zn sites in the lattice. Refinement of the XRD patterns showed minimal distortion to the ZnO unit cell upon doping when MeOH was the solvent due to the immiscibility of the [BEt ] solution (1.0 M solution in hexane) in methanol that limited the amount of B going into the films, thus preventing excessive doping. [Abstract copyright: This journal is © The Royal Society of Chemistry.] |
Year | 2022 |
Journal | RSC Advances |
Journal citation | 12 (51), pp. 33049-33055 |
Publisher | Royal Society of Chemistry (RSC) |
ISSN | 2046-2069 |
Digital Object Identifier (DOI) | https://doi.org/10.1039/d2ra05895b |
https://doi.org/d2ra05895b | |
Publication dates | |
Online | 17 Nov 2022 |
Publication process dates | |
Accepted | 11 Nov 2022 |
Deposited | 18 Jan 2023 |
Publisher's version | License File Access Level Open |
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https://openresearch.lsbu.ac.uk/item/92w9y
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